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SURFACE PLASMON DISPERSION ENGINEERING VIA DOUBLE-METALLIC AU/AG LAYERS FOR NITRIDE LIGHT-EMITTING DIODES

机译:用于氮化物发光二极管的双金属AU / AG层表面等离子弥散工程

摘要

A double-metallic deposition process is used whereby adjacent layers of different metals are deposited on a substrate. The surface plasmon frequency of a base layer of a first metal is tuned by the surface plasmon frequency of a second layer of a second metal formed thereon. The amount of tuning is dependent upon the thickness of the metallic layers, and thus tuning can be achieved by varying the thicknesses of one or both of the metallic layers. In a preferred embodiment directed to enhanced LED technology in the green spectrum regime, a double-metallic Au/Ag layer comprising a base layer of gold (Au) followed by a second layer of silver (Ag) formed thereon is deposited on top of InGaN/GaN quantum wells (QWs) on a sapphire/GaN substrate.
机译:使用双金属沉积工艺,由此将不同金属的相邻层沉积在基板上。第一金属的基础层的表面等离子体频率通过在其上形成的第二金属的第二层的表面等离子体频率来调谐。调整量取决于金属层的厚度,因此可以通过改变一个或两个金属层的厚度来实现调整。在针对绿色光谱领域中的增强型LED技术的优选实施例中,在InGaN的顶部上沉积双金属Au / Ag层,该双金属Au / Ag层包括金(Au)的基础层,然后在其上形成第二银(Ag)层。蓝宝石/ GaN衬底上的/ GaN量子阱(QW)。

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