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INTEGRATED CIRCUIT HAVING LONG AND SHORT CHANNEL METAL GATE DEVICES AND METHOD OF MANUFACTURE

机译:具有长短通道金属门装置的集成电路及其制造方法

摘要

A method is provided for manufacturing an integrated circuit including a short channel (SC) device (16) and a long channel (LC) device (18) each overlaid by an interlayer dielectric (75). The SC device (16) has an SC gate stack (34), and the LC device (18) initially has a dummy gate (50). In one embodiment, the method includes the steps of removing the dummy gate (50) to form an LC device trench (96) and depositing metal gate material (98) over the SC device (16) and the LC device (18). The metal gate material (98) contacts the SC gate stack (34) and substantially fills the LC device trench (96).
机译:提供了一种用于制造集成电路的方法,该集成电路包括各自被层间电介质(75)覆盖的短沟道(SC)器件(16)和长沟道(LC)器件(18)。 SC器件(16)具有SC栅叠层(34),而LC器件(18)最初具有伪栅(50)。在一个实施例中,该方法包括以下步骤:去除伪栅极(50)以形成LC器件沟槽(96),以及在SC器件(16)和LC器件(18)上方沉积金属栅极材料(98)。金属栅极材料(98)接触SC栅极叠层(34)并基本上填充LC器件沟槽(96)。

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