Microwave Semiconductor Research - Materials, Devices, Circuits. GaAs Ballistic Electron Transistors Using Buried Metal Gates.

摘要

This program covers the growth and assessment of Gallium Arsenide, and related compounds and alloys, for use in microwave, millimeter, and optical devices. It also covers the processing of the material into devices, and the testing of the devices. Both molecular beam epitaxy (MBE) and organo-metallic vapor phase epitaxy (OMVPE) are used for growth. Modulation doped heterostructures and very short gate field effect transistors are two areas covered. The following is a list of tasks pursued. (Author)