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LOW COST BONDING TECHNIQUE FOR INTEGRATED CIRCUIT CHIPS AND PDMS STRUCTURES

机译:集成电路芯片和PDMS结构的低成本绑定技术

摘要

Methods of bonding a structure fabricated in polydimethylsiloxane (PDMS) and an integrated circuit chip. The procedures for bonding include providing a substrate, affixing the integrated circuit to the substrate, as needed preparing the surface of the integrated circuit chip to permit bonding, aligning the PDMS structure and the features of the integrated circuit chip, and applying a bonding agent. The bonding agent is cured by exposure to a thermal regime for a suitable length of time. Depending on relative sizes, in some cases, a plural number of PDMS structures can be attached to one chip, or a single PDMS structure can be bonded to multiple chips. In some cases, the integrated circuit chip operates wirelessly. In other situations, the substrate provides electrical communication from the integrated circuit chip to electronic components.
机译:结合在聚二甲基硅氧烷(PDMS)中制造的结构和集成电路芯片的方法。接合过程包括提供基板,根据需要将集成电路固定在基板上,准备集成电路芯片的表面以允许接合,对准PDMS结构和集成电路芯片的特征,以及施加粘合剂。通过暴露在热环境中合适的时间长度来固化粘合剂。根据相对大小,在某些情况下,可以将多个PDMS结构连接到一个芯片,或者可以将单个PDMS结构绑定到多个芯片。在某些情况下,集成电路芯片以无线方式操作。在其他情况下,基板提供从集成电路芯片到电子部件的电通信。

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