A Novel Magnetic Bead-based Biosensor Using Flip Chip Bonding Techniques

摘要

Based on flip-chip packaging,a novel approach towards integrated magnetic bio-separator was designed.The magnetic field and the force on the bead were simulated and analyzed,leading to the optimization of the fabrication parameters of the micro-magnetic unit.The planar coil as an electromagnet was fabricated through electroplating on a single seed layer. The PDMS microfluidic channel was bonded on the inverse side after Si etching.The results presented in this paper provide a novel design and fabrication to approach a microfluidic bio-separation system with magnetic beads.