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PRODUCTION METHOD FOR TANDEM SOLAR CELLS COMPRISING MICROCRYSTALLINE SILICON LAYERS
PRODUCTION METHOD FOR TANDEM SOLAR CELLS COMPRISING MICROCRYSTALLINE SILICON LAYERS
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机译:包含微晶硅层的串联太阳能电池的生产方法
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摘要
The invention relates to a method for producing solar cells comprising at least one p-i-n layer sequence containing micro-crystalline layers with the aid of a PECVD method. Said method is characterised in that all layers of the p-i-n layer sequence are deposited in a single-chamber process. The electrodes are interspaced at a distance of between 5 and 15 mm and the gas is distributed by means of a shower-head gas inlet, which guarantees a homogeneous distribution of the gas over the substrate. SiH4 gas streams with values of between 0.01 and 3 sccm/cm2 are added with a process pressure of between 8 and 50 hPa. The heater temperature is set at between 50 and 280° C. and the HF output is between 0.2 and 2 watt/cm2. The H2 gas streams have values of between 0.3 and 30 sccm/cm2, in particular between 0.3 and 10 sccm/cm2.
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机译:太阳能电池的制造方法技术领域本发明涉及一种借助PECVD方法制造包括至少一个包含微晶层的p-i-n层序列的太阳能电池的方法。所述方法的特征在于,p-i-n层序列的所有层均以单室工艺沉积。电极之间的间距为5到15 mm,气体通过喷头进气口分配,保证了气体在基材上的均匀分布。添加SiH4气流,其值介于0.01和3 sccm / cm2之间,过程压力介于8和50 hPa之间。加热器温度设定在50至280℃之间,并且HF输出在0.2至2瓦特/ cm 2之间。 H 2气流的值在0.3和30sccm / cm 2之间,特别是在0.3和10sccm / cm 2之间。
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