A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device

摘要

The disclosure relates to a device (100) for sealing a chamber inlet (18) or a chamber outlet for a flexible substrate (16), comprising a body (104) having a sealing surface (108), a substrate opening (106) formed in the body configured to be traversed by the flexible substrate, an elastic tube (116) at least partially facing the sealing surface, wherein the elastic tube has a connecting portion for connecting to a gas supply (136) and being adapted for inflating and deflating during operation.. Further, the disclosure relates to a method for assembling a device for sealing a chamber inlet or a chamber outlet for a flexible substrate (16), comprising providing a body (104) having a sealing surface (108), wherein a substrate opening (106) is formed in the body configured to be traversed by the flexible substrate; inserting an elastic tube (116) into the body, such that the elastic tube (116) is facing at least partially the sealing surface (108), the elastic tube having a connecting portion and being adapted for inflating and deflating during operation; and connecting the connecting portion of the elastic tube to a gas supply (136).