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Device, a substrate processing apparatus, and methods of assembling such devices for sealing the chamber outlet or inlet chamber to flexible substrates
Device, a substrate processing apparatus, and methods of assembling such devices for sealing the chamber outlet or inlet chamber to flexible substrates
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机译:用于将腔室出口或入口腔室密封到柔性基板的装置,基板处理设备以及组装这种装置的方法
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摘要
The present disclosure relates to devices (100) for sealing the chamber inlet (18) or the chamber outlet for a flexible substrate (16), the device includes a body (104) having a sealing surface (108), formed in the body is a configured substrate opening so flexible substrate traverses (106), and an elastic tube that face at least partially sealing surface (116), the elastic tube, communicating communicating with the gas supply (136) has a portion, expand and contract during operation. Furthermore, the present disclosure relates to a method of assembling a device for sealing the chamber inlet or chamber outlet for a flexible substrate (16), this method is a step of providing a body (104) having a sealing surface (108), a flexible a step configured board opening (106) is formed in the body so that the substrate is traversed, the elastic tube to the elastic tube (116) so as to face at least partially sealing surface (108) within the body ( 116) is a step of inserting the elastic tube has a communicating portion, comprising the steps of expansion and contraction during operation, a communicating portion of the elastic tube and a step of communicating the gas supply (136).
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