Device for sealing the chamber inlet or outlet chamber for the flexible substrate, the substrate processing apparatus, and a method of assembling such a device

摘要

The present disclosure relates to devices (100) for sealing the chamber inlet (18) or the chamber outlet for a flexible substrate (16), the device includes a body (104) having a sealing surface (108), formed in the body is a configured substrate opening so flexible substrate traverses (106), and an elastic tube that face at least partially sealing surface (116), the elastic tube, communicating communicating with the gas supply (136) has a portion, expand and contract during operation. Furthermore, the present disclosure relates to a method of assembling a device for sealing the chamber inlet or chamber outlet for a flexible substrate (16), this method is a step of providing a body (104) having a sealing surface (108), a flexible a step configured board opening (106) is formed in the body so that the substrate is traversed, the elastic tube to the elastic tube (116) so as to face at least partially sealing surface (108) within the body ( 116) is a step of inserting the elastic tube has a communicating portion, comprising the steps of expansion and contraction during operation, a communicating portion of the elastic tube and a step of communicating the gas supply (136).