APPARATUS FOR VAPOR DEPOSITION OF ORGANIC THIN FILM AND MANUFACTURING METHOD OF FLEXIBLE ORGANIC ELECTRO-LUMINESCENCE DEVICE

摘要

PURPOSE: organic film deposite device and a kind of manufacture flexible organic electroluminescent device provide the precision of the reliability of raising and the OLED in service life, are deposited on substrate by improving deposition of organic thin film. ;CONSTITUTION: conversion zone is limited to chamber (300). Crucible (320) is installed in room and has filled organic material. Base unit (340) supports two substrates to carry out filling organic material from crucible and by hand unit and a linear steering. Linear slide hand unit is moved forward and backward. ;The 2011 of copyright KIPO submissions