Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

摘要

In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are 0.1 cm~2/Vs and 10~6, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.