NON-CONTACT THICKNESS MEASURING APPARATUS USING A FLUORESCENT X-RAY CAPABLE OF CORRECTING THE PHOTON FLUX INFORMATION OF THE FLUORESCENT X-RAY FOR MEASURING WHICH PENETRATES A MEASURED BODY IN REAL TIME

摘要

PURPOSE: A non-contact thickness measuring apparatus using a fluorescent X-ray is provided to obtain a measuring fluorescent X-ray which has optimized thickness measuring capabilities by variously changing the material of a target for measuring to make an object monochrome.;CONSTITUTION: A non-contact thickness measuring apparatus(100) using a fluorescent X-ray comprises an X-ray generator(110), a beam limiter(120), a correcting target(130), a measuring target(140), and a detector(150). The X-ray generator generates an X-ray which becomes multi-color and has a cone-beam shape using an X-ray light source. The beam limiter restricts the X-rays emitted from the x-ray generator at a constant angle to a vertical or horizontal direction. The correcting target in a paralleled state makes an object monochrome for correction to the fluorescent X-ray for correcting in the beam limiter. The measuring target in the paralleled state makes an object monochrome for measuring to the fluorescent X-ray for correcting according to the properties of matter.;COPYRIGHT KIPO 2012