PATTERN PROJECTION DEVICE AND LASER PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pattern projection device and a laser processing device capable of preventing deterioration of a spatial optical modulation element.SOLUTION: A laser processing device 100 according to the present invention includes: a spatial optical modulation element 45 for spatially modulating a laser beam emitted from a laser source 41 by a plurality of mirrors; an illumination optical system including an illumination system 36 for illuminating a substrate 1; an imaging lens 38 for projecting modulation light spatially modulated by the spatial optical modulation element 45 on a target object; and a deflection element 46 for deflecting the travelling direction of the laser beam output from the spatial optical modulation element 45 in a direction coinciding with an optical axis of the imaging lens 38. In the spatial optical modulation element 45, the travelling direction of laser beam incident on the spatial optical modulation element 45 is approximately parallel to a normal line of a reference surface of the spatial optical modulation element 45.