Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices

摘要

Ultra-short laser pulses possess many advantages for materials processing.Ultrafast laser has a significantly low thermal effect on the areas surrounding the focal point;therefore,it is a promising tool for micro-and submicro-sized precision processing.In addition,the nonlinear multiphoton absorption phenomenon of focused ultra-short pulses provides a promising method for the fabrication of various structures on transparent material,such as glass and transparent polymers.A laser direct writing process was applied in the fabrication of high-performance three-dimensional(3D)structured multilayer microsupercapacitors(MSCs)on polymer substrates exhibiting a peak specific capacitance of 42.6 mF·cm^-2 at a current density of 0.1 mA·cm^-12.Furthermore,a flexible smart sensor array on a polymer substrate was fabricated for multi-flavor detection.Different surface treatments such as gold plating,reducedgraphene oxide(rGO)coating,and polyaniline(PANI)coating were accomplished for different measurement units.By applying principal component analysis(PCA),this sensing system showed a promising result for flavor detection.In addition,two-dimensional(2D)periodic metal nanostructures inside 3D glass microfluidic channels were developed by all-femtosecond-laser processing for real-time surfaceenhanced Raman spectroscopy(SERS).The processing mechanisms included laser ablation,laser reduction,and laser-induced surface nano-engineering.These works demonstrate the attractive potential of ultra-short pulsed laser for surface precision manufacturing.