A laser-assisted process to produce patterned growth of vertically aligned nanowire arrays for monolithic microwave integrated devices

摘要

An experimental process for the fabrication of microwave devices made of nanowire arrays embedded in a dielectric template is presented. A pulse laser process is used to produce a patterned surface mask on alumina templates, defining precisely the wire growing areas during electroplating. This technique makes it possible to finely position multiple nanowire arrays in the template, as well as produce large areas and complex structures, combining transmission line sections with various nanowire heights. The efficiency of this process is demonstrated through the realisation of a microstrip electromagnetic band-gap filter and a substrate-integrated waveguide.