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Nanometer-scale transistor architecture providing enhanced carrier mobility

机译:纳米级晶体管架构可提高载流子迁移率

摘要

The present invention provides a nanometer-scale transistor architecture providing enhanced carrier mobility. In particular, a portion of a channel of a transistor is substantially surrounded with an acoustically hard material to form a barrier shell about the channel. The barrier shell functions to confine phonons in the channel. Confining the phonons in the channel reduces the extent to which atoms in the crystal lattice structure of the channel move as they vibrate. Restricting the extent that the atoms vibrate in the crystal lattice of the channel significantly reduces the scattering of electrons or holes traveling through the channel. In one embodiment of the invention, the thickness of the channel is in the order of the thermal phonon wavelength of the material forming the channel, and the barrier shell is acoustically harder than the channel. The benefits of the present invention may be provided without requiring strain engineering.
机译:本发明提供提供增强的载流子迁移率的纳米级晶体管架构。特别地,晶体管的沟道的一部分基本上被声学上坚硬的材料包围以在沟道周围形成阻挡壳。阻挡壳的作用是将声子限制在通道中。将声子限制在通道中可减少通道的晶格结构中的原子随着振动而移动的程度。限制原子在通道的晶格中振动的程度会大大减少通过通道传播的电子或空穴的散射。在本发明的一个实施例中,通道的厚度为形成通道的材料的热声子波长的量级,并且阻隔壳在声学上比通道更硬。可以提供本发明的益处而无需应变工程。

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