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SUSCEPTOR AND DEPOSITION APPARATUS INCLUDING THE SAME

机译：包含相同内容的承继人和沉积物设备

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摘要

Provided is a susceptor, which includes a sintered body and a spindle installation part. The sintered body is formed of silicon carbide and including a recess. The spindle installation part is disposed in the recess. The spindle installation part has lower hardness than that of the sintered body.

机译：提供一种基座，其包括烧结体和主轴安装部。烧结体由碳化硅形成并且包括凹部。主轴安装部设置在凹部中。主轴安装部的硬度低于烧结体的硬度。

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公开/公告号WO2012015259A2

专利类型
公开/公告日2012-02-02

原文格式PDF
申请/专利权人 LG INNOTEK CO. LTD.;KIM YOUNG NAM;
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申请/专利号WO2011KR05577
发明设计人 KIM YOUNG NAM;
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申请日2011-07-28
分类号H01L21/683;H01L21/205;
国家 WO
入库时间 2022-08-21 17:17:58

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