RESONANT PIEZORESISTIVE DETECTOR HAVING A RESONATOR CONNECTED ELASTICALLY TO THE SSUPPORTING MEMBER OF THE DETECTOR, AND PROCESS FOR MANUFACTURING SAID DETECTOR

摘要

The detector comprises: a supporting member (14); a suspended resonator (16), moving parallel to the plane of the supporting member; means (17) for actuating the resonator; and means (18) for detecting the displacement, comprising at least one piezoresistive gauge (20). According to the invention, the resonator is anchored to the supporting member via at least one elastic bending element (22), in order to push back the threshold at which a non-linear displacement regime appears. The detector can be manufactured by a surface technology and is applicable in particular to resonant mass sensors.