Resonant piezoresistive detector having a resonator elastically connected to a support member of the detector, and a process for manufacturing the detector

摘要

A resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device. The device includes: a support; a suspended resonator, which moves parallel to the plane of the support; an actuator for actuating the resonator; and a detector for detecting the movement, including at least one piezoresistive gauge. According to the invention, the resonator is anchored to the support through at least one flexurally elastic element, to enable the threshold where a non-linear displacement regime appears to be raised. The device can be manufactured by a surface technology, and applies notably to resonant mass sensors.