High performance NEMS resonant infrared detector based on an aluminum nitride nano-plate resonator

摘要

This paper reports on the first demonstration of an ultra-fast (thermal time constant of 1.4 ms) and low detection limit (Noise Equivalent Power, NEP of 2.4 nW/Hz^1/2) Nano-Electro-Mechanical Systems (NEMS) resonant infrared (IR) detector based on an aluminum nitride (AlN) nano-plate resonator (NPR). A Si3N4 thin film (100 nm thick) long wavelength IR absorber (LWIR of 8–14 μm) was integrated with an ultra-thin AlN (250 nm thick) NPR working at a higher order lateral-extensional mode (resonance frequency of 196.6 MHz), resulting in a high electromechanical performance (quality factor Q = 1062 and electromechanical coupling coefficient kt² = 1.62%), NEMS resonant structure with unique IR detection capabilities.