ELECTROMAGNETIC CASTING APPARATUS OF SILICON INGOT CAPABLE OF PREVENTING CONTACT OF A SILICON RAW MATERIAL AND A PLASMA TORCH

摘要

PURPOSE: An electromagnetic casting apparatus of silicon ingot is provided to suppress metallic impurity contamination of molten silicon by inserting a silicon raw material into a cooling crucible through a raw material introducing pipe.;CONSTITUTION: A silicon raw material(11) is inserted into a conductive cooling crucible(7) which not includes a bottom surface through a raw material introducing pipe(10). The silicon raw material is melted by a plasma arc heating process and an electro-magnetic induction heating process. The molten silicon raw material is coagulated while passing the cooling crucible. The inner surface of the raw material introducing pipe is covered by a silicon member.;COPYRIGHT KIPO 2012