METHOD FOR ELECTROMAGNETIC CASTING OF A SILICON INGOT, CAPABLE OF PREVENTING THE CONTAMINATION OF A MOLTEN SILICON DUE TO A METALLIC IMPURITY

摘要

PURPOSE: A method for electromagnetic casting of a silicon ingot is provided to increase concentration of oxygen and carbon in molten silicon by maintaining the pressure of the chamber lower pressure than normal pressure.;CONSTITUTION: An inert gas inlet hole(5) guides an inert gas to a chamber. An inert gas guide tube is contacted to the inert gas inlet hole. A discharge pipe(16) is connected to the chamber to discharge ambient gas from the chamber. A pressure adjustment valve(19) is arranged between a discharge pipe and a vacuum pump(18). The pressure within the chamber is controlled by controlling the discharge amount of the ambient gas.;COPYRIGHT KIPO 2012