CONTINUOUS CASTING APPARATUS OF A SILICON INGOT CAPABLE OF REDUCING CONTAMINATION OF A WAFER DUE TO METALLIC IMPURITIES AND A CONTINUOUS CASTING METHOD THEREOF

摘要

PURPOSE: A continuous casting apparatus of a silicon ingot and a continuous casting method thereof are provided to capture particles floating within a chamber using a wool material, thereby preventing an inflow of contaminated particles by metallic impurities during an ingot casting process.;CONSTITUTION: An wool material(17) is arranged on the surface of a member stored within a chamber(1) and/or an inner wall surface of the chamber. A part of particles floating within the chamber is captured by a fiber structure of the wool material. A cooled crucible(7) continuously casts poly-crystal silicon by melting a silicon raw material. A top plate(10) fixes the cooled crucible. An induction coil(8) heats the silicon raw material loaded inside of the cooled crucible using an electromagnetic induction process.;COPYRIGHT KIPO 2012