METHOD FOR FABRICATING SOLAR CELL APPLICATIONS USING INDUCTIVELY COUPLED PLASMA CHEMICAL VAPOR DEPOSITION

摘要

PURPOSE: A method for fabricating a solar cell through inductively coupled plasma chemical vapor deposition is provided to achieve a micro-crystallized intrinsic layer of a solar cell. CONSTITUTION: A method for fabricating a solar cell through inductively coupled plasma chemical vapor deposition comprises steps of: forming an intrinsic layer of a solar cell using an inductively coupled plasma chemical vapor deposition apparatus which uses a mixed gas including hydrogen gas and silane gas. The solar cell includes a first electrode(210), a first type layer(220), the intrinsic layer(230), a second type layer(240), and a second electrode(250).