METHOD FOR PRODUCING ZINC OXIDE-BASED POWDER AND ZINC OXIDE-BASED SINTERED BODY, AND TARGET USING THEM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing zinc oxide-based powder and a zinc oxide-based sintered body capable of achieving capsule hot isostatic pressing sintering enabling production of a high-density sintered body with suppressed volatilization of zinc, and to provide a target.;SOLUTION: This zinc oxide-based powder is powder in which the ratio of the atomicity of titanium is ≥0.2% and ≤10% to the whole metal atomicity, and the tap density is ≥2.8 g/cm³, and which is obtained by mixing zinc oxide-based powder whose tap density is ≥2.8 g/cm³, and which is obtained by firing raw material zinc oxide powder whose tap density is 2.8 g/cm³ at 900-1,400°C in the atmosphere, with low-valence titanium oxide powder.;COPYRIGHT: (C)2013,JPO&INPIT