ZINC OXIDE-BASED SINTERED BODY, PRODUCTION METHOD THEREOF, SPUTTERING TARGET AND TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide-based sintered body, its production method, etc. which suppress occurrence of abnormal discharge, or arcing, in producing a transparent conductive film of high resistivity applicable to e.g. a buffer layer of CIGS type solar batteries by sputtering.;SOLUTION: A zinc oxide-based sintered body contains 0.01-1 mass%, based on oxides, of at least one added element selected from Mg, Al, Ti, Ga, In and Sn and 20-200 mass ppm of Si element; the crystal grain sizes of zinc oxide in the sintered body are 25-100 μm; Si element is present in the sintered body in the form of Si-containing crystal grains of grain sizes of 5 μm or smaller; and the Si-containing crystal grains are not deposited in the crystal grain boundary of zinc oxide in the sintered body. A method of producing the sintered body uses, as a Si element supply source, a silicon compound which has a siloxane structure and is liquid at room temperature, and the sintering temperature for the molding is set in the range of 900-1,400°C.;COPYRIGHT: (C)2014,JPO&INPIT