MATERIAL FOR THIN FILM STRAIN SENSOR AND THIN FILM STRAIN SENSOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide material for a thin film strain sensor having high strain sensitivity, low lateral sensitivity, and a low resistance temperature coefficient, and to provide a thin film strain sensor using the material.;SOLUTION: The Cr content of material for a thin film strain sensor of the present invention is 14-25 mass%, and the rest is composed of Pd and inevitable impurities. A thin film strain sensor 1 according to the present invention is obtained by forming, on an insulating film (not shown): a sensing part 3 for sensing strain; and lead parts 4 formed at both ends of the sensing part 3. At least the sensing part 3, among the sensing part 3 and the lead parts 4, is formed using the material for a thin film strain sensor.;COPYRIGHT: (C)2014,JPO&INPIT