THIN FILM STRAIN SENSOR MATERIAL AND THIN FILM STRAIN SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a thin film strain sensor material and a thin film strain sensor which have a gauge factor of nearly zero in a vertical arrangement and has a large gauge factor in a parallel arrangement.;SOLUTION: The present invention relates to a thin film strain sensor material expressed by a general formula of Cr_100-xM_x. A second element M is added in a composition ratio x of 0≤x≤30% by atoms so that the gauge factor will be in the range of 0±0.3 when the thin film of the material is arranged on a higher temperature side of the Neel temperature of the material in a vertical direction to the direction of strain of a measurement target. When the second element M is Ni, the composition ratio x is in the range of 5≤x≤22% by atoms, and when the second element M is Fe, the composition ratio x is in the range of 17≤x≤28% by atoms.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT