Strain sensors and pressure sensors using Cr-N thin films for high-pressure hydrogen gas

摘要

The authors investigated the influence of hydrogen on Cr-N strain-sensitive thin films, which have a gauge factor of about 14, to develop a high-sensitive strain sensor for high-pressure hydrogen gas. As a result, it was found that the thin film was not affected by hydrogen and the specimen of Cr-N thin film on Zirconia substrate showed a sensitive and linear output to the pressure. It was considered that the Cr-N thin films were able to be expected as not only high-sensitive strain sensors but also diaphragm-less pressure sensors in high-pressure hydrogen gas.