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In inside the processed device null vacuum chamber of the blade edge
In inside the processed device null vacuum chamber of the blade edge
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机译:在处理过的设备内部,叶片边缘没有真空室
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摘要
PROBLEM TO BE SOLVED: To provide a blade member having a blade edge with improved cutting performance by improving sharpness, a blade member having a blade edge with increased rigidity by increasing hardness, and to provide a processing device for efficiently processing the above blade edge.;SOLUTION: Ion beam processing to be performed by using a plasma ion gun under a specified condition with respect to the blade edge of each blade body group by using argon as a medium, and plasma ion implantation processing to be performed by using a plasma ion implantation gun under a specified condition with respect to the blade edge of each blade body group by nitrogen plasma, are performed inside a vacuum chamber.;COPYRIGHT: (C)2009,JPO&INPIT
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