TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT CONDUCTIVE FILM LAMINATED BODY AND PRODUCTION METHOD OF SAME AND SILICON BASED THIN FILM SOLAR CELL

摘要

A transparent conductive film, useful in producing a highly efficient silicon-based thin film solar cell, superior in hydrogen reduction resistance and superior in optical confinement effect; a transparent conductive film laminated body using the same; a production method therefore ; and a silicon-based thin film solar cell using this transparent conductive film or the transparent conductive film laminated body, as an electrode. It is provided by a transparent conductive film or the like, characterized by containing zinc oxide as a major component and at least one or more kinds of added metal elements selected from aluminum and gallium, whose content being within a range shown by the following expression (1), and having a surface roughness (Ra) of equal to or larger than 35.0 nm, and a surface resistance of equal to or lower than 65Ω/□ -[Al]+0.30[Ga]-2.68x[Al]+1.74 --- (1) (wherein [Al] represents aluminum content expressed as atomicity ratio (%) of Al/(Zn+A1) ; while [Ga] represents gallium content expressed as atomicity ratio (%) of Ga/(2n+Ga)).