TRANSPARENT CONDUCTIVE FILM LAMINATE, METHOD OF PRODUCING TRANSPARENT CONDUCTIVE FILM LAMINATE, THIN-FILM SOLAR CELL AND METHOD OF PRODUCING THIN-FILM SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film laminate which is useful as a surface electrode in producing a high-efficiency silicon-based thin-film solar cell, has an irregular structure having excellent light scattering properties and an excellent light confinement effect, a method of producing the transparent conductive film laminate, a thin-film solar cell using the transparent conductive film laminate and a method of producing the thin-film solar cell.SOLUTION: A transparent conductive film laminate has a structure consisting of an indium-oxide-based transparent conductive film (I) of a film thickness of 10-300 nm and a zinc-oxide-based transparent conductive film (II) of a film thickness of 200 nm or greater, and its surface is a crystalline structure in which concave and convex parts are mixed and has a surface roughness (Ra) of 30 nm or greater, a haze ratio of 8% or higher and a resistance value of 30 /sq or lower.