首页> 外国专利> METHOD FOR MANUFACTURING CIGS THIN FILM FOR SOLAR CELL USING SIMPLIFIED CO-EVAPORATION AND CIGS THIN FILM FOR SOLAR CELL MANUFACTURED USING THE METHOD

METHOD FOR MANUFACTURING CIGS THIN FILM FOR SOLAR CELL USING SIMPLIFIED CO-EVAPORATION AND CIGS THIN FILM FOR SOLAR CELL MANUFACTURED USING THE METHOD

机译:利用简化的共蒸发制造太阳能电池的CIGS薄膜的方法以及利用该方法制造太阳能电池的CIGS薄膜的方法

摘要

Disclosed are a method for manufacturing CIGS thin film for a solar cell using simplified co-evaporation and a CIGS thin film for a solar cell manufactured using the method. The method for manufacturing a CIGS thin film for a solar cell according to the present invention comprises: (step a) depositing Cu, Ga and Se on a substrate, which is at 500-600°C, via co-evaporation; (step b) depositing Cu, Ga, Se and In via co-evaporation while maintaining the same substrate temperature as in step a; and (step c) while lowering the temperature of the substrate, sequentially depositing Ga and Se via co-evaporation, then depositing just Se via vacuum evaporation. Accordingly, the processing steps are simplified compared to the three-step co-evaporation, and the benefits of band-gap grading, from the crystal growth within the thin film and compositional distribution of Ga, are fully realized, thus allowing processing efficiency to be improved.
机译:公开了一种使用简化的共蒸发制造用于太阳能电池的CIGS薄膜的方法以及使用该方法制造的用于太阳能电池的CIGS薄膜。根据本发明的用于太阳能电池的CIGS薄膜的制造方法包括:(步骤a)通过共蒸发在500-600℃的基板上沉积Cu,Ga和Se; (步骤b)通过共蒸发沉积Cu,Ga,Se和In,同时保持与步骤a相同的衬底温度; (步骤c)在降低衬底温度的同时,通过共蒸发顺序沉积Ga和Se,然后通过真空蒸发仅沉积Se。因此,与三步共蒸发相比,简化了处理步骤,并且充分实现了由于薄膜内的晶体生长和Ga的成分分布而产生的带隙级配的优点,因此可以提高处理效率。改善。

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