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METHOD FOR POLISHING GLASS SUBSTRATE

机译:玻璃底物的抛光方法

摘要

Provided is a method for polishing a glass substrate, in which the glass substrate is polished while supplying a polishing solution between the glass substrate and a polishing pad, said method being characterized in that the polishing solution is a cerium oxide slurry and the temperature of the polishing solution is adjusted to 20˚C or lower during the supply of the polishing solution between the glass substrate and the polishing pad.
机译:本发明提供一种玻璃基板的研磨方法,其中,一边在玻璃基板与研磨垫之间供给研磨液一边对玻璃基板进行研磨,其特征在于,研磨液为氧化铈浆料,其温度为2℃。在玻璃基板与研磨垫之间供给研磨液时,将研磨液调整为20℃以下。

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