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A method for the production of a long bulk single crystal of sic or aln and a long volume single crystal of sic or aln
A method for the production of a long bulk single crystal of sic or aln and a long volume single crystal of sic or aln
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机译:生产sic或aln的长块单晶和sic或aln的长体积单晶的方法
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摘要
A process for the preparation of a bulk single crystal (2) made of sic or aln, whereina) in a crystal growth area (5) of a growth vessel (3; 23) a seed crystal (8; 18) with a start of growth surface and a central longitudinal center axis (14) is arranged, wherein a nucleus by knives of the seed crystal (8; 18) by at most 10% smaller than a single crystal is formed by knives of the bulk single crystal (2) is,b) in the crystal growth area (5) a growth gas phase (9) is generated and the volume of single crystal (2) by means of deposition from the growth gas phase (9) wake up,c) the growth gas phase (9) is at least partially made of a pulverulent expanding material (6) made of sic or aln, which is in a storage region (4) of the growth vessel (3; 23) is located, is fed,characterized in thatd) in front of the culture is the beginning of a virtually gas-tight volume between the block (7; 19; 26) of sic or aln in the growth crucible (3; 23) is used,e) known as swelling material components of the swelling section by means of the material (6) between the storage area (4) and the crystal growth area (5) and arranged..
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