Coating apparatus, method of manufacturing the filling method and the organic layer of the liquid

摘要

PROBLEM TO BE SOLVED: To reduce the time to fill a liquid such as an EL liquid material into a supply pipe and to prevent bubbles from being generated in the liquid filled in the supply pipe.;SOLUTION: The coating apparatus 100 includes a liquid tank 108, a nozzle head 106 discharging the liquid, the supply pipe 107 piped from the tank 108 to the nozzle head 106, a feeder 116 for sending the liquid 120 in the tank 108 to the supply pipe 107, a switching part 110 provided on the supply part 107 or the nozzle head 106 and a vacuum pump 113 connected to the switching part 110. The switching part 110 is provided so as to selectively switch a state where the supply pipe 107 communicates with the vacuum pump 113 and a state where the supply pipe 107 is blocked from the vacuum pump 113 to from each other.;COPYRIGHT: (C)2011,JPO&INPIT