An organic electroluminescent device formed using a vacuum deposition apparatus, a vacuum deposition method or the vacuum vapor deposition apparatus and a vacuum deposition method

摘要

The deposition of multiple, including at least a deposition second material different from the deposition material deposited first with a uniform density in the film thickness direction and depositing a first material to be deposited to produce a concentration gradient in the thickness direction a moving device for moving the deposition target member, a vacuum vapor deposition apparatus for forming a film by depositing on the same surface of the deposition member, the material, the concentration gradient in the thickness direction of the deposited first material towards the deposition target member and a, and a dispersion second container release distributed first container to release to occur, so that a uniform density in the thickness direction of the deposited second material towards the deposition target member.