An organic electroluminescent device formed using a vacuum deposition apparatus, a vacuum deposition method or the vacuum vapor deposition apparatus and a vacuum deposition method

摘要

Vacuum deposition apparatus, even in the film thickness direction and distributed first container to release a moving device for moving the deposition target member, so that the concentration gradient occurs in the thickness direction of the deposited first material, the deposition of the second material and a dispersion second container releases so that the concentration of the dispersion container of the first shielding member for shielding a part of the emitting area of ​​the vapor deposition material is provided with a first, distributed the first container, By part of the emitting area of ​​the deposition material first is shielded by the shielding member, unlike emission along the moving direction of the deposition member, the distributed second container, and the vapor deposition material of the second By discharging substantially at the center of the deposition area of ​​member, to be as uniform emission along the moving direction of the deposition member.