As well as method of manufacturing a graphene, graphene is produced on a substrate, a substrate on graphene

摘要

I will provide a manufacturing method of the production of graphene on a substrate. Here, in the forming step, is formed on the (103) on the substrate (505) solid solution layer by heating to dissolution temperature solid solution with carbon dissolved in the metal can be formed, made of the solid solution. Then, in the removal step, by removing the metal layer from a solid solution (505) while maintaining the heating of the solid solution temperature, growing a (102) graphene substrate (103) on. In addition to the metal of the single element, various alloys are also available for the solvent to solid solution carbon. By removing the metal layer from a solid solution (505) by supplying an etching gas, graphene (102), so that contact with the (103) substrate.