MANUFACTURING METHOD OF CATALYST-FREE SUBSTRATE GROWN GRAPHENE, CATALYST-FREE SUBSTRATE GROWN GRAPHENE, AND MANUFACTURING APPARATUS OF CATALYST-FREE SUBSTRATE GROWN GRAPHENE

摘要

Provided is a manufacturing method of catalyst-free substrate grown graphene. More specifically, provided is a manufacturing method of catalyst-free substrate grown graphene, comprising the following steps: (a) preparing a substrate on which a substrate layer is formed; (b) supplying carbon-containing gas and conducting metal organic chemical vapor deposition (MOCVD); and (c) growing graphene on the substrate layer without comprising a catalyst layer.;COPYRIGHT KIPO 2016