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Polyimide-based polymers, copolymers thereof and positive type photoresist compositions comprising the same
Polyimide-based polymers, copolymers thereof and positive type photoresist compositions comprising the same
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机译:聚酰亚胺基聚合物,其共聚物以及包括该聚合物的正型光刻胶组合物
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摘要
Polyimide-based polymers and copolymers thereof are provided. Further provided is a positive type photoresist composition comprising at least one of the polyimide-based polymers and copolymers thereof as a binder resin. The photoresist composition exhibits high resolution, high sensitivity, excellent film characteristics and improved mechanical properties, which are required for the formation of semiconductor buffer coatings.
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