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Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist

机译:酸性聚酯酰亚胺作为负性黑色光刻胶的热稳定粘合剂聚合物

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摘要

Polyimides are well-known for their high chemical inertness and thermal stability. However, it is usually challenging to synthesize UV-curable polyimides since the imidization reaction requires such harsh conditions that acrylate type double bonds cannot withstand. In this work, synthetic methods are developed to obtain polyester-imide type binder polymers with high thermal stability, high compatibility with the other components of the black photoresist, and fine photolithographic patterning property for the negative-tone black photoresist. The syntheses of diimide-diacid or diimide-diol intermediates for the polyesterification with dianhydride gave polyester imides which meets this requirement. The photolithographic tests have shown that the patterning of the micron-sized PDL of the organic light emitting diode (OLED) panel could be obtained. This work will interest the researchers working on the design and optimization of thermally stable binder polymers.
机译:聚酰亚胺以其高化学惰性和热稳定性众所周知。然而,它通常是挑战,因此合成紫外线可固化的聚酰亚胺,因为酰亚胺化反应需要丙烯酸酯型双键不能承受这种苛刻的条件。在这项工作中,开发了合成方法以获得具有高热稳定性的聚酯 - 酰亚胺型粘合剂聚合物,与黑色光致抗蚀剂的其他组分高的相容性,以及负色调黑光致抗蚀剂的细光刻图案化性能。二酰亚胺二酸或二酰亚胺二醇中间体用二酐衍生化的二酰亚胺 - 二醇中间体,得到聚酯酰亚胺,符合该要求。光刻试验表明,可以获得有机发光二极管(OLED)面板的微米尺寸PDL的图案化。这项工作将利益研究热稳定粘合剂聚合物的设计和优化的研究人员。

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