EUV mask defect reconstruction and compensation repair

摘要

Embodiments of the invention provide approaches for extreme ultraviolet (EUV) defect reconstruction and compensation repair. Specifically, a defect starting point of a defect of a mask is determined, and the performance of the mask with the defect is simulated. The simulated performance of the mask is compared to an empirical analysis of the mask to produce a profile of the mask and the defect. An initial image of the mask geometry, with the defect, is calculated, and then compared to a target image of the mask. From this, a compensated layout is generated. As such, embodiments provide a EUV fabrication system that detects and corrects for defects in the blanks and patterned masks to avoid or counteract the defect. Once a compensated pattern has been designed and successfully simulated, the mask may be patterned with the compensated design.