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Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device
Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device
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机译:不良率预测方法,不良率预测程序,半导体制造装置的管理方法以及半导体装置的制造方法
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摘要
In a managing system for a semiconductor manufacturing apparatus, a predicting unit 121 predicts a characteristic defective ratio and a foreign-substance defective ratio of each process obtains an actual defective ratio of each fail bit mode and a critical area of each process and each fail bit mode, calculates the number of foreign substances of each process by using the actual defective ratio of each fail bit mode and the critical area of each process and each fail bit mode, the fail bit mode being except for an arbitrary fail bit mode, calculates a foreign-substance defective ratio of each process and a foreign-substance defective ratio of each fail bit mode by using the number of foreign substances, and calculates a characteristic defective ratio of the arbitrary fail bit mode based on the foreign-substance defective ratio and actual defective ratio of each fail bit mode.
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