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METHOD FOR FILM SYNTHETHIS OF LITHIUM LUMINOPHORE-OXINITRIDE (LiPON) FOR SOLID LITHIUM ACCUMULATORS BY HF MAGNETRONE SPUTTERING METHOD
METHOD FOR FILM SYNTHETHIS OF LITHIUM LUMINOPHORE-OXINITRIDE (LiPON) FOR SOLID LITHIUM ACCUMULATORS BY HF MAGNETRONE SPUTTERING METHOD
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机译：高频磁控溅射法薄膜合成固态锂蓄积剂中的三氧化二锂（LiPON）的方法
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摘要
A method for synthesis of lithium luminophore-oxynitride (LiPON) films for solid accumulators is realized by high-frequency magnetron sputtering method. The synthesis is carried out at 25- temperature of the substrate during 4-6 hours with HF power of sputtering 2-2.5 V cmand a nitrogen pressure of 10-40 mTorr.
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机译：通过高频磁控溅射法实现了一种用于固体蓄电池的锂光氮氧化锂（LiPON）薄膜的合成方法。合成在基板的25度温度下进行4-6小时，溅射功率为2-2.5 V cm，氮气压力为10-40 mTorr，进行HF溅射。
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