TEMPERATURE CONTROLLER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, METHOD FOR CALCULATING PID CONSTANTS IN SEMICONDUCTOR MANUFACTURING, AND METHOD FOR OPERATING TEMPERATURE CONTROLLER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

A temperature controller for semiconductor manufacturing equipment (3) is equipped with a temperature control means (72) for heating and cooling a fluid, which is used by semiconductor manufacturing equipment, on the inside in order to control the temperature of the fluid, and is equipped with a heat exchanger (7) that exchanges heat between fluid that has flowed in and the temperature control means (72). The temperature controller for semiconductor manufacturing equipment (3) is further equipped with: a proportional-integral-derivative (PID) constant calculation means (85) for calculating PID constants for PID control on the basis of the physical properties of the fluid, and a time constant of a temperature sensor (6) that measures the temperature of the fluid; and a PID control calculation means (86) that performs PID control of the temperature control means on the basis of the PID constants calculated by the PID constant calculation means (85).