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Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
A temperature adjustment system configured to adjust the temperature of a fluid used in a semiconductor manufacturing apparatus includes: a heat exchanger including therein a temperature adjuster for heating and cooling the fluid, the heat exchanger being configured to perform heat exchange between the fluid therein and the temperature adjuster; a temperature sensor configured to measure the temperature of the fluid; a PID-constant calculator configured to calculate PID constants for PID control based on the physical properties of the fluid and a time constant of the temperature sensor; and a PID-control calculator configured to perform the PID control on the temperature adjuster with the PID constants calculated by the PID-constant calculator.
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