ELECTRON PENETRATION FILM PROTECTION DEVICE OF SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE HAVING SAME

摘要

The present invention relates to a scanning electron penetration film protection device of a scanning electron microscope and a scanning electron microscope having the same. The scanning electron penetration film protection device of a scanning electron microscope applies a negative electrode or a positive electrode to an electron beam scanning route between an electron beam output unit and an electron penetration film of the scanning electron microscope having the electron penetration film to locate a test sample in atmospheric pressure conditions to be observed so that a scanning direction of an electron heading toward the electron penetration film can be changed toward a negative electrode output unit or a positive electrode output unit. The scanning electron penetration film protection device of a scanning electron microscope allows the electron beam to head toward the electron penetration film or not to head toward the electron penetration film, thereby preventing the service life of the electron penetration film from being shortened by allowing the electron not to penetrate the electron penetration film if the test sample is not observed while outputting the electron beam.;COPYRIGHT KIPO 2014