SYSTEMS FOR AND METHODS OF CONTROLLING TIME-MULTIPLEXED DEEP REACTIVE-ION ETCHING PROCESSES

摘要

Improved gas delivery systems and methods according to the recipe line at least two of the determined step of the gas delivery process deliver a sequence of pulses of the prescribed amount of gas to the process chamber of the process tool. This system comprises a corresponding plurality of channels each including a control valve connected to control each of the pulses of the gas flowing into the process chamber of the process tool through the channel; And an exhaust valve for controlling the pressure in the process chamber, the control valve and the operation of the gas delivery system including an exhaust valve including a valve controller for controlling the line determined according to the recipe of the step, and an exhaust valve. In one embodiment, the exhaust valve controller, the exhaust valve is opened the pressure in the process chamber subsequent to the feedback control loop and open-loop control which is set in pre-selected positions on the basis of the past learned position for each step of the process gas passes the system is configured to operate in a feedback mode of a hybrid containing both closed loop feedback control for each step of, as a process gas delivery functions. ;