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Magnetic semiconductor substrate, manufacturing equipment manufacturing method and magnetic semiconductor substrate of the magnetic semiconductor substrate
Magnetic semiconductor substrate, manufacturing equipment manufacturing method and magnetic semiconductor substrate of the magnetic semiconductor substrate
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机译:磁性半导体基板,制造设备的制造方法以及磁性半导体基板的磁性半导体基板
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摘要
PROBLEM TO BE SOLVED: To provide a substrate for magnetic semiconductor, a manufacturing method for the same and a manufacturing apparatus for the same that can shorten the introduction time of magnetic atoms to a substrate and can provide a magnetic semiconductor usable even at room temperature.SOLUTION: A substrate for magnetic semiconductor comprises: a diffusion receiving layer 103 of semiconductor in which a thin film of magnetic atoms is formed on the irradiation surface to be irradiated by laser; and a thermal conduction suppressing layer 102 which is in contact with a surface opposite to the irradiation surface of the diffusion receiving layer and that has thermal conductivity lower than that of the diffusion receiving layer.
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